SEMI S2
Increasingly compliance to SEMI S2 including S8 and S14 is appearing on purchase orders and engineering specifications. Compliance is often demonstrated through a report that is typically created by an independent third party. UL's machinery assessment services (MAS) team can prepare a complete report after evaluating equipment to SEMI S2 requirements.
SEMI S8
The science of ergonomics, also known as human factors engineering, helps design safe, productive and user-friendly products and workplaces. Utilizing ergonomics can increase company profits by lowering or eliminating redesign costs and reducing insurance and product liability costs.
SEMI S8, the S2 supplement for ergonomics or human factors engineering of semiconductor manufacturing equipment, provides ergonomic design principles and considerations for semiconductor manufacturing equipment. It was developed to provide guidelines for a flexible partnership between the equipment manufacturer and the equipment purchaser. Adhering to these guidelines promotes compatibility in the integration of user personnel and equipment within a semiconductor manufacturing environment. These guidelines apply to the design, installation, operation, maintenance and service of semiconductor manufacturing equipment.
